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National Repository of Grey Literature

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	SMV-2015-14: Development of e-beam lithography technology Horáček, Miroslav ; Kolařík, Vladimír ; Matějka, Milan ; Krátký, Stanislav ; Chlumská, Jana ; Meluzín, Petr ; Král, Stanislav Development of the devices for electron beam lithography technology. Research and development cover the complete lithography system, in particular Schottky Zro/W electron emitter, electron optical column including beam forming system, X-Y stage, high vacuum system, control system electronics. Detailed record
	Thin Metallic Layers Structured by E-beam Lithography Horáček, Miroslav ; Kolařík, Vladimír ; Urbánek, Michal ; Matějka, František ; Matějka, Milan The group of electron beam lithography runs the laboratory equipped with a shaped beam electron writer (BS600) and the basic technology for the lithographic process. The group is able to prepare micro and nano structures in thin layers of metals and other materials; including the characterization of the realized structures (using AFM, SEM, and CLSM). Within a few months (in the frame of the 'ALISI' project) a new e-beam writer with a better resolution will be installed; it will enable the realization of the actual structures in a better quality and the development of new structures with a very high innovation potential. Detailed record
	Annual report, project MPO FR-TI1/574: Optimization of production flow in electron-beam lithography and mastering Polívka, L. ; Kolařík, Vladimír ; Mikšík, P. The e-beam writer BS600 is an electron-optical system with a shaped electron beam which was developed and optimized for production of relief microstructures with a sub-micron resolution. The goal of this project period is defined as follows: the extension of previously developed experimental exposure regime with a reduced stamp size should be extended to the production stage such that diffractive structures up to the size of 3 mm x 3 mm could be prepared. The goal was achieved; the results are summarized in this report. Detailed record

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